JPS643166Y2 - - Google Patents

Info

Publication number
JPS643166Y2
JPS643166Y2 JP16337881U JP16337881U JPS643166Y2 JP S643166 Y2 JPS643166 Y2 JP S643166Y2 JP 16337881 U JP16337881 U JP 16337881U JP 16337881 U JP16337881 U JP 16337881U JP S643166 Y2 JPS643166 Y2 JP S643166Y2
Authority
JP
Japan
Prior art keywords
flange
rod
vacuum chamber
attached
threaded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16337881U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5868656U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16337881U priority Critical patent/JPS5868656U/ja
Publication of JPS5868656U publication Critical patent/JPS5868656U/ja
Application granted granted Critical
Publication of JPS643166Y2 publication Critical patent/JPS643166Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP16337881U 1981-10-31 1981-10-31 真空室插入棒状体の位置調整装置 Granted JPS5868656U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16337881U JPS5868656U (ja) 1981-10-31 1981-10-31 真空室插入棒状体の位置調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16337881U JPS5868656U (ja) 1981-10-31 1981-10-31 真空室插入棒状体の位置調整装置

Publications (2)

Publication Number Publication Date
JPS5868656U JPS5868656U (ja) 1983-05-10
JPS643166Y2 true JPS643166Y2 (en]) 1989-01-26

Family

ID=29955674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16337881U Granted JPS5868656U (ja) 1981-10-31 1981-10-31 真空室插入棒状体の位置調整装置

Country Status (1)

Country Link
JP (1) JPS5868656U (en])

Also Published As

Publication number Publication date
JPS5868656U (ja) 1983-05-10

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